Check the listing for details. Horiba STEC Criterion D500 Mass Flow Controller MFC D514MG 150CCM SO2. Condition: New. Listed at 399.99 USD. This is a brand new, never used or installed Horiba D500 MFC Controller. If there are any problems with this unit, please don't hesitate to send us a message so we can remedy the situation with a return/refund. We want to provide our customers with the best service and parts. We buy our inventory from local precision manufacturers within the semiconductor community to ensure quality and OEM performance standards. For custom quantities, please send us a message inquiry and we can get you a quote. If there are any issues with your order, please reach out and we will be glad to help. Here at Semiconductor Parts Depot LLC, we strive to provide quality & precision semiconductor parts, industrial fittings and gaskets, vacuum sensors and other accessories to small businesses and DIYers across the USA. Located in Hillsboro, OR we are in the heart of the Pacific Northwest Silicon Forest, allowing us to source our inventory from local high-precision companies in the industry. We stock new & used inventory from many top-quality brands such as MKS Instruments, Applied Materials, Hitachi High Tech, Swagelok, Lam Research, Entegris, Parker Veriflo, CKD, and many more. We look forward to doing business with you. If you have any questions or issues with your order, please don't hesitate to contact us directly. CRITERION D500Pressure Insensitive Mass Flow ModuleThis leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. Pressure Insensitive PerformanceA new high-performance Pressure Insensitive function provides a simplified gas supply system Multi-range, multi-gas, multi-pressure solutionThe new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis functionThe advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput High AccuracyFlow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment Fast ResponseResponse: < 0.8 secondAccurate, stable flow control can be achieved Dynamic RangeWide control range: 0.2% F.S. to 100% F.S.