Check the listing for details. KLA Instruments Exhaust Module KLA-Tencor 5015 Working Surplus. Condition: Used. Listed at 404.22 USD. KLA Instruments Exhaust Module KLA-Tencor 5015 Working Surplus Inventory # 20942 Model No: Exhaust Module Removed from a KLA Instruments KLA 5015 125mm Coherence Probe Metrology System This KLA Instruments Exhaust Module is used working surplus. The physical condition is good, but there are signs of previous use and handling. Sale Details Item Condition: Used Working, 90 Day Warranty Estimated Packed Shipping Dimensions: L x W x H = 24"x24"x24" @ 50 lbs. Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes. Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale. For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary. Items are sold with a 90-Day Satisfaction Guarantee Lister 31